KARL SUSS MA6/BA6 FOR SALE
- Model: KARL SUSS MA6/BA6 TSA SN 711
- Manufacturer: Suss MicroTec / Karl Suss
- Wafer Size Capability: Small Pieces up to 6”/150mm Diameter Wafers
- Topside (TSA) Alignment
- Suss Dual Video Microscope DVM6
- Objectives: 5X, 10X, 20X
- UV400 Optics (for 365nm and 405nm exposure)
- CIC 1200 UV Power Supply
- Capable of Proximity, Soft, Hard and Vacuum Contact with proper tooling.
- Currently set up with 3 inch Vacuum Contact Alignment Chuck and 4 inch Mask Holder tooling, capable of Vacuum Contact, Hard and Soft Contact
- 350 Watt Lamphouse (can operate w/ 200 Watt or 350 Watt HG UV lamps)
- Incorporated Newport Vibration Isolation Table (for Suss MA6)
- System Power: 230V, 50/60 Hz
- Operations Manual for Suss MA6 Mask Aligner
- Fully Refurbished by Suss factory trained technicians
- Includes Installation, Operation and Maintenance Training
- Includes 6 Month Parts and Labor Warranty
- Live or Video customer demonstration available in Costa Mesa, CA
Price $75,000.00 – Please call for Terms